Contextual based groundrule compensation method of mask data set generation
US6430733B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1999 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Apr 22, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/36
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A structure and method of designing an integrated circuit includes generating at least one device shape, altering the device shape to comply with predetermined rules, forming a first hierarchical level abstraction around the device shape (where the first hierarchical level abstraction represents a perimeter of the device shape), preparing a first hierarchical level arrangement of first hierarchical level abstractions, altering the first hierarchical level arrangement to comply with the predetermined rules, forming a second hierarchical level abstraction around the first hierarchical level arrangement (where the second hierarchical level abstraction represents a perimeter of the first hierarchical level arrangement), preparing a second hierarchical level arrangement of second hierarchical level abstractions, and altering the second hierarchical level arrangement to comply with the predetermined rules.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.