Substrate storage cassette positioning device and method
US6432849B1 · kind B1 · utility
463Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2000 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | Jul 31, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate storage cassette positioning device and method for positioning a substrate storage cassette in a predetermined location on an installation platform, comprising a guide section for guiding the substrate storage cassette into a predetermined location during the positioning of the substrate storage cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.