Apparatus for fine positioning of a component, and coordinate measuring machine having an apparatus for fine positioning of a component
US6438856B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 11, 2000 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Oct 20, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/0004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for fine positioning of a component has a symmetrical, one-piece double parallel spring element having a movable center bar, suspended on bending points, which carries the component. The center bar is preloaded in the direction of the frame by way of an elastic element. The center bar can be adjusted in almost ideally tilt-free fashion with a fine adjustment element arranged between the center bar and frame. A high-precision coordinate measuring instrument having a measurement stage for receiving a substrate that is to be measured, an incident-light and/or transmitted-light illumination device, and an imaging optical system with a vertical optical axis, has a fine positioning apparatus of this kind with a vertically arranged double parallel spring element. Mounted on its center bar is an objective holder, and thereon the objective with an objective axis parallel to the movement direction of the center bar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.