Indirect endpoint detection by chemical reaction and chemiluminescence
US6440263B1 · kind B1 · utility
5Cited by
28References
5Claims
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Key dates
| Filing date | Aug 17, 2000 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Oct 9, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/175383
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Detection of the endpoint for removal of a target film overlying a stopping film by removing the target film with a process that selectively generates a chemical reaction product (for example ammonia when polishing a wafer with a nitride film in a slurry containing KOH) with one of the stopping film and the target film, converting the chemical reaction product to a separate product, producing excited molecules from the separate product, and monitoring the level of light emitted from the excited molecules as the target film is removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.