Method of fabricating a miniaturized integrated circuit inductor and transformer fabrication
US6441715B1 · kind B1 · utility
77Cited by
6References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 16, 2000 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Feb 16, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for fabricating inductors and transformers on integrated circuits. A magnetic material is formed on the semiconductor substrate. The magnetic material comprises a suspension of magnetic material in an insulator. A metal film is formed that forms at least one coil around the magnetic material forming an inductor structure. Two adjacent coils can be linked with the magnetic material to form a transformer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.