Apparatus and method for loading substrates of various sizes into substrate holders
US6441899B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2000 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Nov 22, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67346
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for loading substrates of various sizes into a substrate holder. The apparatus for this purpose comprises a base plate with peripheral rim and at least three support means arranged on the base plate, each of which has configured on it different support surfaces for the various substrates. The support surfaces are arranged in stepped fashion on the support means. In addition, receiving elements for the substrate holder are arranged on the base plate in such a way that the substrate holder that is set in place surrounds the support means and is aligned and oriented in terms of its position. At least one sensor element is housed in at least one of the support surfaces of a support means for one substrate size, so as thereby to detect the size of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.