Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element

US6441975B1 · kind B1 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Michael J. Ebert · Fridley, US
• Franz Sorg · Aalen, DE
• Michael Trunz · Pfahlheim, DE
• Frank Marianek · Oberkochen, DE
• Karlfried Osterried · Aalen, DE
• Markus Kasparek · Oberkirch, DE

Key dates

• Filing date: Nov 27, 2000
• Grant date: Aug 27, 2002
• Expiry date: Nov 27, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/00
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A device for the low-deformation support of an optical element (2), in particular of an end plate of a lens in a projection printing system for semiconductor elements, is provided with a mount (1), the optical element (2) being connected to the mount (1) at least partly via a bonding layer which is located between the adjacent circumferential walls (4, 5) of mount (1) and optical element (2). The mount (1) is provided with at least three bearing feet (3) which are distributed over the circumference and on which the optical element (2) rests. The bonding layer is located in an annular gap (6) between the adjacent circumferential walls (4, 5) of mount (1) and optical element (2) over at least one section thereof.