Purification of methylsilanes
US6444013B1 · kind B1 · utility
3Cited by
16References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2000 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Sep 19, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/20
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A process for purifying methylsilane is described. Methylsilane containing impurities such as carbon dioxide, chlorosilane and atmospheric gases is fed from a source container unit to an adsorption unit at −40° C. The adsorption unit is connected to a collection unit at −190° C. where the purified methylsilane is transported and can be stored.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.