Patrick J. Helly
3Patents
3h-index
5Co-inventors
39Inventor score
Filing activity: Sep 19, 2000 → Apr 10, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7514119B2 | Method and apparatus for using solution based precursors for atomic layer deposition | Emerging Cross-Sectional Technologies | 9 | Active |
| US6936537B2 | Methods for forming low-k dielectric films | Electricity | 5 | Expired |
| US6444013B1 | Purification of methylsilanes | Chemistry; Metallurgy | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.