Scanning charged-particle beam instrument
US6444991B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2000 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Jul 19, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20242
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is disclosed a scanning electron charged-particle beam instrument in which the image does not escape during rotation even if the center of mechanical rotation is not coincident with the center of the image. The instrument is so operated that the center position of the image is fixed when a mechanical rotation is made if the center of mechanical rotation is not coincident with the center of the image. For this purpose, when the specimen stage assembly is rotated mechanically, the X-stage of the specimen stage assembly is driven to move in the X-direction. The Y-stage of the stage assembly is driven to move in the Y-direction. The distance L between the center of mechanical rotation and the moving speed of the X-Y stage are interlinked. The apparent speed of the rotational speed of the image on the viewing screen is made constant irrespective of the distance L. In practice, the moving speed of the X-Y stage is increased with increasing the distance L.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.