Air-conditioning apparatus, partition and exposure apparatus
US6450288B1 · kind B1 · utility
5Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Jul 28, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F13/24
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
An exposure apparatus capable of minimizing low-frequency noise intruding into a chamber from the outside, wherein a partition of the chamber comprises a structure formed by sandwiching a ceramic honeycomb structural material (18) between a pair of steel or aluminum plates (16), the partition having a very high sound-proofing effect against low-frequency noise owing to its rigidity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.