Antihalation compositions
US6451503B1 · kind B1 · utility
27Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1996 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Apr 30, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/38
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.