Cassette measuring system
US6452150B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Apr 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Apparatus is provided for on-line monitoring of objects such as cassettes and similar devices used for handling semiconductor wafers to determine whether the objects remain within relevant dimensional tolerances during wafer processing. The apparatus includes a high resolution digital camera for photographing an object to provide digital images to be used to determine whether relevant dimensions of the object are within tolerance limits, and a computer for storing images of the object taken by the camera and for analyzing the images to determine whether relevant dimensions of the object are still within tolerance limits. The camera and computer operate together in accordance with a method further provided by the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.