Probe contactor and production method thereof
US6452407B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Dec 18, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/4092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe contactor is formed on a planar surface of a substrate by a photolithography technology. The probe contactor is configured by a substrate having an interconnect trace thereon which is an electric conductive path, and a contactor formed on the substrate through a photolithography process. The contactor has a base portion vertically formed on the substrate, a horizontal portion, one end of which is formed on the base portion, and a contact portion formed on another end of the horizontal portion. A spring force of the horizontal portion of the contactor provides a contact force when the probe contactor is pressed against a contact target. The contact portion of the contactor is sharpened so that when the contactor is pressed against the contact target, it scrubs a surface of the contact target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.