Dual axis micro machined mirror device
US6454421B2 · kind B2 · utility
18Cited by
7References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2001 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | Jun 1, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/1821
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges. At least two electrostatic force application pads are disposed to rotate the mirror about a primary axis and about a secondary axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.