Two-piece chuck
US6454864B2 · kind B2 · utility
4Cited by
13References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 14, 1999 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | Jun 14, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A two-piece chuck for supporting a substrate in which a base plate allows the wafer to tilt and also exposes the underside of the wafer during wash/rinse cycle as well as during load/unload operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.