Bondhead for a wire bonder
US6460751B1 · kind B1 · utility
11Cited by
10References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 24, 2000 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | Oct 24, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/01082
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A Wire Bonder contains a bondhead which comprises a slide, a rotary beam rotatable on a vertical axis and a rocker mounted on the rotary beam. The slide is movable back and forth in a predetermined horizontal direction and moves the rotary beam with it. The slide preferably bears on a horizontally arranged glide plate by means of an air bearing charged with vacuum. The rotary beam also preferably bears on the glide plate by means of a further air bearing charged with vacuum. A drive arranged on the slide is preferably foreseen for the rotating movement of the rotary beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.