Method for fabricating a part depletion type SOI device preventing a floating body effect
US6461903B2 · kind B2 · utility
10Cited by
7References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 6, 2001 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | Jun 6, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6715
Abstract
Disclosed is a part depletion type SOI device capable of preventing a floating body effect and a method for fabricating the same. The part depletion type SOI device comprises physical isolated spaces on boundaries between a channel region and source/drain regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.