Micromechanical cap structure and the respective manufacturing method

US6462392B1 · kind B1 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Stefan Pinter · Reutlingen, DE
• Harald Emmerich · Tübingen, DE
• Hans-Peter Trah · Reutlingen, DE
• Helmut Baumann · Gomaringen, DE

Key dates

• Filing date: Feb 5, 2001
• Grant date: Oct 8, 2002
• Expiry date: Feb 5, 2021

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0163
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical cap structure and a corresponding manufacturing method are described, the cap structure having a substrate, in particular in the form of a wafer, having a cavity made therein. The cavity includes a bottom surface and two pairs of opposite parallel side wall sections. The cavity has at least one stabilizing wall section, which connects two side wall sections. This considerably increases the stability of the cap structure.