Beam delivery and imaging for optical probing of a device operating under electrical test
US6462814B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 15, 2000 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | Mar 15, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus for optically probing an electrical device while the device is operating under control of a tester of the kind that applies test vectors and that has a test head in which the device can be mounted. An optical probe system has a light delivery and imaging module that is configured to be docked to a test head and that has imaging optics and a fine scanner. An optical processing subsystem can generate an incoming beam of light to illuminate the device through an optical fiber to a fiber end in the module. The fiber end is mounted in a fixed position on the optical axis of the imaging optics, and the fiber end and imaging optics are mounted in a fixed position to the platform of the fine scanner. Operating the fine scanner moves the fiber end, the imaging optics, the optical axis, and the focal point as a rigid unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.