Method for producing a thin membrane and resulting structure with membrane
US6465327B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2001 |
| Grant date | Oct 15, 2002 |
| Priority date | — |
| Expiry date | Feb 28, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/2007
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a method for producing a thin membrane, comprising the following steps:implanting gas species, through one surface of a first substrate (10) and through one surface of a second substrate (20), which in said substrates are able to create microcavities (11, 21) delimiting, for each substrate, a thin layer (13, 23) lying between these microcavities and the implanted surface, the microcavities being able, after their implantation, to cause detachment of the thin layer from its substrate;assembly of the first substrate (10) onto the second substrate (20) such that their implanted surfaces face one another;detaching each thin layer (13, 23) from its substrate (10, 20), the thin layers remaining assembled together to form said thin membrane.The invention also concerns a thin membrane structure obtained with this method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.