Surface texture measuring machine and method of correcting a measured value for the machine
US6466884B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2001 |
| Grant date | Oct 15, 2002 |
| Priority date | — |
| Expiry date | Jun 11, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D3/0365
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface texture measuring machine includes a vertical V-axis column D, a vertically movable table E, a horizontal X-axis guide 17 and a slider 18 disposed on the vertically movable table E, a probe C attached to the slider 18, a V-axis detector 13, a displacement detector 27, an X-axis detector 74, and a control device CPU. The control device CPU calculates the amount of a bending deformation in the X-axis direction at the height of the X-axis guide 17, from a height signal from the V-axis detector 13 and a displacement amount signal from the X-axis detector 74, and sets a value that is obtained by subtracting the bending deformation amount from the X-axis direction displacement amount, as an X-axis displacement in measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.