Radiation detectors including thermal-type displaceable element with increased responsiveness
US6469301B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | May 12, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Radiation detector arrays are provided that include one or more thermal-type displaceable elements having reduced thickness without compromising mechanical strength or sensitivity of the displaceable elements to incident radiation. An exemplary displaceable element includes first and second membrane layers made of materials having different coefficients of thermal expansion. The layers are supported relative to a substrate by a leg. The displaceable element can also serve as an absorbing member for the incident radiation to be detected. Each element can also include a reflector of signal light. When the displaceable element incident radiation (such as infrared radiation) to be detected, it undergoes heating which bends the element. Displacement of the element is detected as a change in signal light or as a change in capacitance. If the displaceable member includes a signal-light reflector, the reflector includes a planar portion including “dropped” edges serving to strengthen the planar portion and allow the thickness of the planar portion to be reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.