Patent · US Expired

Coherent gradient sensing ellipsometer

US6469788B2 · kind B2 · utility

31Cited by

5References

29Claims

0Family size

Assignee

CALIFORNIA INSTITUTE OF TECHNOLOGY · US

Inventors

David A. Boyd · Vancouver, CA
Ares J. Rosakis · Altadena, US
David Owen · Northwich, GB

Key dates

Filing date	Mar 27, 2001
Grant date	Oct 22, 2002
Priority date	—
Expiry date	Mar 27, 2021

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/211
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and techniques for integrating an optical coherent gradient sensing (CGS) module and another optical sensing module to simultaneously measure the curvature and another property of a specularly reflective surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.