Antihalation compositions
US6472128B2 · kind B2 · utility
28Cited by
37References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2001 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | Aug 7, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/151
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.