Patent · US Expired

Solution of tetramethylammonium hydroxide in water and a process for preparing the solution

US6472130B1 · kind B1 · utility

3Cited by

2References

21Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Stefan Geyer · Dresden, DE
Michael Horn · South Setauket, US

Key dates

Filing date	Oct 16, 2000
Grant date	Oct 29, 2002
Priority date	—
Expiry date	Oct 16, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/322
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A solution of tetramethylammonium hydroxide in water comprises a surfactant component and a hydrotropic component. A process for preparing a solution for developing an exposed photoresist comprises the steps: preparation of a solution of tetramethylammonium hydroxide in water; addition of a surfactant component; and addition of a hydrotropic component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.