Lithographic projection apparatus, supporting assembly and device manufacturing method
US6473161B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2001 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | May 30, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A supporting assembly for use in a lithographic projection apparatus includes a moveable member which is journalled in a housing such that substantially no vibration forces are transmitted between the moveable member and the housing. The assembly comprises a gas filled pressure chamber in which the gas in the pressure chamber acts on the moveable member so as to at least partially counteract the force due to the weight of the moveable member and any other object which it carries. The pressure chamber is supplied with gas and the whole assembly is constructed and arranged such that substantially no gas flows through the pressure chamber when the moveable member is substantially stationary. The supporting assembly may be applied to a lithographic projection apparatus, object table, or metrology frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.