Scanning wide-area surface shape analyzer
US6473186B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2001 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | May 18, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning wide-area surface shape analyzer drastically shortens a time period required for measuring the surface shape of a surface to be inspected. A scanner moves the measuring head in parallel with a flat surface for the measuring head to acquire the measured image data. An attitude-varying mechanism varies the acquisition attitude of the measuring head for acquiring the measured image data. An image processing control device analyzes and calculates the surface shape of an acquisition area corresponding to the acquisition position and in the acquisition attitude. The image processing control device controls driving of the scanner and the attitude-varying mechanism, calculates the next acquisition position by using measured image data acquired at the present acquisition position and in the present acquisition attitude, and calculates an acquisition attitude to be taken at the calculated next acquisition position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.