Extreme repetition rate gas discharge laser with improved blower motor
US6477193B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2000 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Apr 3, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2207
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. Important improvements over prior art designs include: (1) a squirrel cage type fan for producing gas velocities through the discharge region of more than 67 m/s and capable of continuous trouble-free operation for several months, (2) a liquid cooled drive motor having a low loss sealing member separating the motor rotor from the motor starter and protecting the motor from the laser gas and a breach detection device for detecting any breach of the sealing member, (3) a heat exchanger system capable of removing in excess of 16 kw of heat energy from the laser gas and (4) a pulse power system capable of providing precisely controlled electrical pulses to the electrodes needed to produce laser pulses at the desired pulse energies in the range of 5 mJ to 10 mJ or greater at pulse repetition rates in the range of 4,000 Hz to 6,000 Hz or greater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.