Microfabricated filter and shell constructed with a permeable membrane
US6478974B1 · kind B1 · utility
59Cited by
11References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 1999 |
| Grant date | Nov 12, 2002 |
| Priority date | — |
| Expiry date | Jul 6, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of fabricating a microfabricated filter. The method includes forming a frame structure and forming a plurality of openings through the frame structure. A permeable polysilicon membrane is formed over the plurality of openings through the frame structure. At least part of the sacrificial structure is etched with an etchant wherein the etchant passes through the permeable polysilicon membrane. The permeable polycrystal silicon membrane may have a thickness of between about 0.05 micrometers and about 0.30 micrometers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.