Detection of a gaseous substance emanating from a layer of polymeric composition
US6479018B2 · kind B2 · utility
1Cited by
17References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2001 |
| Grant date | Nov 12, 2002 |
| Priority date | — |
| Expiry date | Jan 16, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/25875
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Detection of an evolving or diffusing gaseous substance emanating from an irradiated or thermolyzed layer of polymeric composition in semiconductor processing or similar processes is disclosed. The evolving or diffusing gaseous substance is detected by spatially disposing from the irradiated or thermolyzed layer a detector layer that includes a compound having leaving groups that are sensitive to the gaseous substance being detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.