Method and apparatus for measuring thickness variation of a thin sheet material, and probe reflector used in the apparatus
US6480286B1 · kind B1 · utility
22Cited by
3References
11Claims
0Family size
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Key dates
| Filing date | Mar 22, 2000 |
| Grant date | Nov 12, 2002 |
| Priority date | — |
| Expiry date | Mar 22, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Optical displacement gauges 20 are respectively arranged on both sides of a thin sheet material w, and displacement of surface position of the thin sheet material w is measured by irradiating measurement light L1 to the surface of the thin sheet material w. Thickness variation of the thin sheet material w is obtained from the measurement results of displacement of the surface position of the thin sheet material w.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.