System and method for classifying an anomaly
US6483938B1 · kind B1 · utility
107Cited by
26References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2000 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Mar 6, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/014
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system for generating and managing a knowledgebase for use in identifying anomalies on a manufactured object, such as a semiconductor wafer, includes measures for adding, deleting, and organizing data from the knowledgebase.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.