Substrate transport apparatus with multiple arms on a common axis of rotation
US6485250B2 · kind B2 · utility
86Cited by
17References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 30, 1998 |
| Grant date | Nov 26, 2002 |
| Priority date | — |
| Expiry date | Jan 6, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.