System and method for coating substrates with improved capacity and uniformity
US6485616B1 · kind B1 · utility
10Cited by
7References
62Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1999 |
| Grant date | Nov 26, 2002 |
| Priority date | — |
| Expiry date | Dec 29, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system and method for coating substrates. The coating process includes an improved capacity and uniformity through the addition of a second motion component in which the substrates move in a closed path. A major portion of the path is linear and the configuration of the coating machine is such that all substrates follow the same trajectory with respect to the machine during the coating process, resulting in a coating which is substantially the same for all substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.