Method of making opto-electronic devices using sacrificial devices
US6485993B2 · kind B2 · utility
32Cited by
13References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2000 |
| Grant date | Nov 26, 2002 |
| Priority date | — |
| Expiry date | Dec 31, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0237
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for making optoelectronic devices with interdigitated arrays of photonic devices is disclosed wherein an array of first type photonic devices and sacrificial device(s) is hybridized to a driver circuitry substrate, the sacrificial devices are removed, and an array of second type photonic devices is hybridized into the spaces left by removal of the sacrificial devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.