Optical detector for measuring relative displacement of an object on which a grated scale is formed

US6486467B1 · kind B1 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Peter Speckbacher · Kirchweidach, DE
• Dieter Michel · Traunstein, DE

Key dates

• Filing date: Dec 21, 1999
• Grant date: Nov 26, 2002
• Expiry date: Dec 21, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/34715
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Electronic components of an optoelectronic sensor for a measuring system are arranged on the side of a semiconductor substrate that is facing away from a scale. The semiconductor substrate between electronic components and the scale is removed at those locations where the components emit or detect an electromagnetic beam. In this way, it is possible to arrange all of the electrical connections of the components and further electronic assemblies of the measuring system on a first side of the semiconductor substrate, and all optical components of the measuring system on a second side of the semiconductor substrate.