Radiometric scatter monitor
US6490031B1 · kind B1 · utility
3Cited by
6References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2000 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Sep 29, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/0271
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Scattered light is detected radiometrically in a photolithography system. A photodetector makes direct measurements of scatter at points in the line or plane of illumination, and a generalized scatter function is derived from these measured data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.