Method and apparatus for improving a dark field inspection environment
US6490032B1 · kind B1 · utility
2Cited by
7References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2000 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Nov 8, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8822
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method is disclosed for facilitating a dark field inspection. The workpiece inspection apparatus comprises three sides and a light-blocking top and defines a dark field inspection area. Light incident on the top is substantially blocked while a clean room environment is maintained by allowing air to permeate through the top.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.