Upper cover plate for an air-tight chamber and a tool for removing the same
US6491178B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2000 |
| Grant date | Dec 10, 2002 |
| Priority date | — |
| Expiry date | Feb 17, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An upper cover plate for an air-tight chamber and a tool for removing the upper cover plate from the chamber are introduced. The upper cover plate integrates a chamber body to form the air-tight chamber, in which the chamber body further includes a top surface for air-tightly matching with a bottom surface of the upper cover plate. The upper cover plate further includes a plurality of thread holes engageable respectively with a plurality of the tools. The present invention is characterized on that at least one of the thread holes is formed as a through thread hole connecting to the bottom surface, and that the respective tool for engaging with the through thread hole includes a portion for penetrating the through thread hole and going beyond the bottom surface. By providing the present invention, the top surface of the chamber body can be utilized as a pivotal plane for the tool to easily perform a helical lifting application upon the upper cover plate through the engaged threads, so that the air-tight state of the chamber can be easily removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.