Device for wet etching an edge of a semiconductor disk
US6494221B1 · kind B1 · utility
69Cited by
26References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 16, 1999 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Nov 16, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention concerns a device for wet etching an edge of a semiconductor disk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.