Patent assignee · AT · COMPANY

SEZ AG

13Patents
0Active
13Granted
29Portfolio score

Filing activity: Nov 16, 1999 → Mar 6, 2006

Most-cited patents

PatentTitleAreaCited byStatus
US6494221B1 Device for wet etching an edge of a semiconductor disk Emerging Cross-Sectional Technologies 69 Expired
US6536454B2 Device for treating a disc-shaped object Emerging Cross-Sectional Technologies 47 Expired
US6858092B2 Device and process for liquid treatment of wafer-shaped articles Emerging Cross-Sectional Technologies 35 Expired
US7270510B2 Device and method for transporting wafer-shaped articles Emerging Cross-Sectional Technologies 19 Expired
US7007702B2 Device and process for liquid treatment of wafer-shaped articles Emerging Cross-Sectional Technologies 13 Expired
US7172674B2 Device for liquid treatment of wafer-shaped articles Electricity 9 Expired
US7279116B2 Method for the wet treatment of disk-like objects Electricity 8 Expired
US7122084B2 Device for liquid treatment of disk-shaped objects Electricity 6 Expired
US7267129B2 Device and process for liquid treatment of wafer-shaped articles Emerging Cross-Sectional Technologies 4 Expired
US7057973B2 Method and device for measuring cavitation Physics 3 Expired
US7052577B2 Annular receptacle for a rotating carrier Electricity 2 Expired
US7179753B2 Process for planarizing substrates of semiconductor technology Electricity 1 Expired
US7078340B2 Metal deposit process Electricity 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.