Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly
US6494343B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2001 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Feb 15, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2250/0469
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fluid containment system including a vessel for containing a fluid that is discharged from the vessel in use or operation of the system. A pressure monitoring assembly including a strain-responsive sensor is disposed on an exterior wall surface of the vessel, to sense dynamic strain on the wall surface of such vessel that is incident to discharge of fluid from the vessel, and to responsively output a pressure-indicative response. Such arrangement is particularly useful in application to fluid storage and dispensing vessels containing interiorly disposed pressure regulator assemblies and holding liquefied gases or compressed gases, e.g., for use in semiconductor manufacturing operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.