Wafer carrier having more support ribs and lighter weight and method
US6494775B1 · kind B1 · utility
3Cited by
2References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2001 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Oct 15, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67346
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A lightweight, carrier for wafer-like objects, including semiconductor wafers, is provided. The carrier may be used to secure and position a wafer during various polishing processes. The improved design of the lightweight carrier includes a relatively high number of ribs and an annular flange having an annular protrusion to provide uniform load onto the wafer during polishing operations. The relatively lower weight of the carrier facilitate manual loading and unloading of it (the carrier) into and from the polishing machine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.