Patent · US Expired

Device for flushing the optical path of a UV laser beam

US6495795B2 · kind B2 · utility

9Cited by

9References

16Claims

0Family size

Assignee

Lambda Physik AG · DE

Inventors

Andreas Görtler · Bamberg, DE
Andreas Haupt · Göttingen, DE

Key dates

Filing date	Dec 1, 2000
Grant date	Dec 17, 2002
Priority date	—
Expiry date	Dec 26, 2020

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/225
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A device for flushing the optical path of a UV laser beam has a casing (18) with which the optical path is separated from the external atmosphere (26). In order to maximize the life of the optical components (24, 26) in the optical path, a noble gas, in particular argon, is used for flushing the optical path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.