Temperature-controlled chuck and method for controlling the temperature of a substantially flat object
US6495802B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2001 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | May 31, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention generally relates to a method for controlling the temperature of a substantially flat object and to a temperature-controlled chuck comprising a chuck body (20) having an object support side (21) and a back side (22). Said object support side (21) holds a substantially flat object (1) having a front side (2) and a back side (3) on said back side (3) of said object (1). A plurality of temperature sensing elements (4) is distributed on said object support side (1) to measure the temperature distribution of said flat object (1). A plurality of individual temperature influencing elements (6; 8; 9) is distributed on said object support side (21) to face said back side (3) of said flat object (1), each of said temperature influencing elements (6; 8; 9) being arranged to influence the temperature of a partial area of said object's back side (3) as desired.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.