Semiconductor wafer holder
US6497403B2 · kind B2 · utility
17Cited by
17References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 28, 2000 |
| Grant date | Dec 24, 2002 |
| Priority date | — |
| Expiry date | Dec 28, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6875
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A holder for holding a semiconductor wafer for treatment in wafer treating apparatus including a plurality of supports for generally point support of the wafer at a plurality of points on the wafer. Each support bears a fraction of weight of the wafer and is movable up and down and subject to force biasing it to move upward. The total of the forces exerted on the supports biasing them upward is adapted to counterbalance the weight of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.