Narrow band excimer or molecular fluorine laser with adjustable bandwidth

US6498803B2 · kind B2 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Peter Heist · Jena, DE
• Jürgen Kleinschmidt · Hersbruck, DE

Key dates

• Filing date: Feb 1, 2001
• Grant date: Dec 24, 2002
• Expiry date: Feb 1, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/225
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by a resonator for generating a laser beam, a discharge circuit including a plurality of electrodes for energizing the gain medium and a line-narrowing unit within the resonator for narrowing the bandwidth of the laser system. The resonator includes a deformable resonator reflector. A technique for adjusting the bandwidth of the laser system includes adjusting a surface contour of the deformable resonator reflector. A desired bandwidth may be selected manually or using a processor which automatically controls the surface contour adjustment.