Heater temperature uniformity qualification tool

US6500266B1 · kind B1 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Henry Ho · Tokyo, JP
• Alexander M. Rubinchik · San Jose, US
• Aihua Chen · Fremont, US
• Abril Cabreros · Gilroy, US
• Steven T. Li · Cupertino, US
• Mark Yam · Monte Sereno, US
• Bruce W. Peuse · Redwood City, US

Key dates

• Filing date: Jan 18, 2000
• Grant date: Dec 31, 2002
• Expiry date: Jan 18, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67103
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An apparatus of a reactor or processing chamber comprising a chamber having a resistive heater disposed within a volume of the chamber, including a stage having a surface area to support a substrate such as a wafer and a body including at least one heating element, a shaft coupled to the body, a plurality of temperature sensors coupled to the chamber, each configured to measure a temperature at separate points associated with the surface area of the stage, and a motor coupled to the shaft and configured to rotate the resistive heater about an axis through the shaft. In this manner, the temperature sensors may measure a temperature at separate points of the surface area of the stage. A method of rotating a shaft and measuring a plurality of temperatures over the surface area of the stage or over a wafer seated on the stage with the plurality of temperature sensors.