Method and apparatus for controlling the taper angle of the walls of laser machined features
US6501045B1 · kind B1 · utility
8Cited by
22References
7Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 6, 2000 |
| Grant date | Dec 31, 2002 |
| Priority date | — |
| Expiry date | Apr 6, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/389
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A new method and apparatus for moving an excimer laser beam relative to a workpiece to control the wall profile of laser machined features, such as holes and grooves. An excimer laser beam is displaced relative to a workpiece in a substantially circular motion and the substantially circular motion is further displaced relative to the workpiece to correspond to a desired shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.